Electron beam lithography produced a pattern of gold on quartz.
Feature width is 30 nm. (20,000X SEI 5KeV) (Sample courtesy of EDTEK, Inc., Kent, WA)
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Main: 425.335.4400
Fax: 603.658.4519
info@semlab.com
Feature width is 30 nm. (20,000X SEI 5KeV) (Sample courtesy of EDTEK, Inc., Kent, WA)